Dry Vacuum Pumps＜EBARA＞

Dry Vacuum Pumps (EBARA)

Model	Note
EV-S	Etching CVD PVD SEM Inspection System Light-absorbing Layer Formation Texture Formation Edge Isolation Silicon materials Lamination Evaporation Liquid Injection Electron Microscopes Mass Spectrometers Reduced-pressure Drying Vapor Deposition／Sputtering Sterilization Plastic Molding
EV-M	Etching CVD P diffusion Edge Isolation Antireflective Film Formation Silicon materials
ESA	Etching CVD PVD ODF SEM Inspection System Ingots Light-absorbing Layer Formation Texture Formation Edge Isolation Silicon materials Lamination Evaporation Solvent Drying Liquid Injection Electron Microscopes Mass Spectrometers Vapor Deposition／Sputtering Plastic Molding Reduced-pressure Drying Sterilization
ESR	Etching CVD PVD SEM Inspection System P diffusion Edge Isolation Silicon materials Lamination Evaporation Drying Liquid Injection Electron Microscopes Mass Spectrometers Plastic Molding Vapor Deposition／Sputtering
PDV	PVD SEM Inspection System Silicon materials Lamination Evaporation Electron Microscopes Mass Spectrometers Reduced-pressure Drying Vapor Deposition／Sputtering Sterilization Plastic Molding
EST	CVD
EBANET3	Etching CVD